GHz Range Nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) with Self-Sustained CMOS Oscillator

This paper reports on the design and experimental verification of a new class of nanoscaled AlN ContourMode Resonant Sensors (CMR-S) for the detection of volatile organic chemicals (VOC) operating at frequencies above 1 GHz and connected to a chip-based CMOS oscillator circuit for direct frequency readout. This work shows that by scaling the CMR-S to 250 nm in thickness and by operating at high frequencies (1 GHz) a limit of detection of ~35 zg/μm2 and a fast response time (<1>ms) can be attained. In addition, the capability to detect concentrations of volatile organic compounds such as 2,6 dinitroluene (DNT) as low as 1.5 ppb (4.7 ag/μm2) is experimentally verified.